All-good-state ultraviolet lasers have already been greatly used in the fields of mechanical flaw detection, lithography, micromachining and medicine for the advantages of modest volume, extended existence, significant effectiveness, very good beam top quality, broad tuning and slender spectral line, etcetera. Utilizing superior ability near-infrared coherent light-weight resource as the basic frequency source according to nonlinear tuning technologies, building ultraviolet coherent radiation by multistage frequency conversion is viewed as a crucial way to create the ultraviolet coherent mild resource.
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We summarized the current advancement status with the significant-electric power DUV laser equally on the wavelength of FHG of your 1-μm laser and at 193 nm. The the latest growth on the sound-point out/fiber laser, and also the nonlinear optical crystals, prompts not merely the average electricity but will also the beam top quality (coherence) with the DUV lasers to an unparalleled stage.
The common electricity from the NIR laser nonetheless has the opportunity being improved to tens of watts including 70 W [26] In the event the double-pass configuration could possibly be utilized for the Yb:YAG SCF amplifier phase. For this reason, In case the conversion efficiency of 31% from NIR to DUV can be however maintained at this increased power issue, the common output power in the DUV laser at 258 nm could be in excess of 20 W, which might be considered a amazing electrical power degree for your DUV laser and result in the unanticipated DUV laser machining effects. Furthermore, for prime-electricity DUV laser, the UV injury in the nonlinear crystal, including the Home windows for CLBO crystal plus the mirrors, is an additional important parameter for long run and stable operation.
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Also, combining the sound-point out laser with other nonlinear method such as stimulated Raman scattering, NIR lasers may very well be accomplished at new wavelengths with significant power and significant beam high quality, which was examined via the evidence-of-principle experiment. This Raman laser scheme offers a fresh route to the substantial-electric power DUV laser, Primarily for the wavelength of 193 nm.
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